VERTEX-II
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
Kookje Electric Korea Co., Ltd.
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
16
| Product name | VERTEX-II | Certification | - |
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| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
The VERTEX-II series of Vertical Diffusion/CVD Systems are designed for processing 150mm (6-inch) or smaller wafers. Among the advantages of vertical processing chambers over horizontal furnaces are lower air intake and less native oxide growth on wafers before processing. The vertical design also minimizes the amount of floor space required, allowing efficient use of the clean room.
Benefits and Features
- With the batch processing of 150 sheets(D Type)(100 sheets (C Type)) of 6" Wafer at once, provides high efficiencies.
- Lower intake of external air and reduction of native oxide growth compared to horizontal furnace.
- Since quartz subsidiary equipment and reactor tube do not come in contact, low particle is generated.
- Actualize excellent yield rate of production line with superb uniformity and low particle generation by optimizing process conditions and air flow inside the equipment.
- Provides quick wafer transfer with 5 wafers transfer robot.
- Since side-by-side unit placement is enabled, space efficiencies of the clean room is improved.
- Since the height(2300mm(C Type)) of equipment is relatively low as a vertical type device, installation in low-ceilinged cleanroom is available.
Specifications
| Classification | Wafer Diameter | Batch Size | Cassette Racks | Cassette I/O | Dimensions (WxDxH) |
| VERTEX-II (D Type) |
Max .150mm | 150 Wafers | 8 Cassettes | 1 Cassette | 800x1200x2600mm |
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Jaleong Jang
- Address
- 4-2, Chaam-dong, Cheonan Si, Chungcheongnam-do, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 101-500
- Company introduction
-
Kookje Electric Korea Co., Ltd. with putting all efforts on continuous research and development based on the company philosophy of being 'the Foundation of Korean Semiconductor Industry' was jointly established with worldwide semiconductor equipment maker Hitachi Kokusai Electric Inc. in May, 1993. Our goal is localizing the semiconductor equipment through the manufacture, sales of semiconductor & LCD equipment, maintenance and R&D.
Our major products are the Vertical Diffusion Furnace proceeding isolation process and others by generating oxide films, and Vertical LP CVD System treats that generate crucial films of equipment. These equipment take charge of critical processes in high quality semiconductor productions.
- Main Markets
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China
Japan
Taiwan
U.S.A
- Main Product
