ICP CVD system for Graphene and Boron Carbide Layers
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- cvd
- Category
- Other Machinery & Industry Equipment
A-Tech System, Inc.
- Country / Year Established
- South Korea /
- Business type
- Others
- Verified Certificate
-
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Product name | ICP CVD system for Graphene and Boron Carbide Layers | Certification | - |
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Category | Other Machinery & Industry Equipment | Ingredients | - |
Keyword | cvd | Unit Size | - |
Brand name | - | Unit Weigh | - |
origin | Stock | - | |
Supply type | - | HS code | - |
Product Information
Graphene synthesis Special Features Multi-functional CVD system combined with ICP CVD and probe station. Maximum substrate temperature: 1,000°C. Automatic loading available during susceptor heating. High density plasma source. PC-control system. Specifications Wafer capacity : 6" wafer x 1 Average throughput: 4,800 wafer/year Dimension : 1,500W × 1,800D × 1,830H (mm3) Power : ICP Power supply Bias power supply Heater : Heating element - SiC coated graphite(max. temp.:1,200°C) Gas : Ar/CH4/H2/B2H2/C2H2/O2/N2/NH3 Pump : dry pump, turbo pump, booster pump |
B2B Trade
Price (FOB) | Negotiable | transportation | - |
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MOQ | Negotiable | Leadtime | Negotiable |
Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Cho, Young Sang
- Address
- 175-25, Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, 403-853, Rep. Korea
- Product Category
- Machinery & Parts
- Company introduction
-
Developed itmes
- Ion beam source
- Arc source
- Filtered cathodic vacuum arc system and process
- LPCVD for nanotube synthesis
- Silica PECVD system
- UHV(Ultra High Vacuum) sputtering system
- Silica TCP (Transformer Coupled Plasma) etcher
- UHV-sputter system for ferromagnetic multilayers
- Vacuum arc system for nitrides deposition
- In-line system of vacuum arc deposition for protecting PDP
electrodes
- High vacuum test system for a flat light source evaluation
- Multifunctional standard sputtering system for R&D
- NPPN(New Post Plasma Nitriding) System
- Sputter for polygon mirror applicable to laser printer
- Production scale of arc ion plating (AIP) system
- Ion beam sputter for precision optics
- Production scale of AIP and NPPN systems
- Ion plating system for various coloration
- Pilot scale of arc discharge equipment for CNT transparent electrode
sputter web coater for flexible display research
- Sputter system for ophthalmic
- Polycrystalline silicon ingot growing equipment
- PECVD system for anti-reflective coatings on solar cell
- PECVD system for graphene deposition
- Al plasma nitriding equipment for mass production with KAITECH
- Equipment of carbon nanotube using electrical arc discharge method
- Graphene PECVD-PVD Cluster equipment
- Main Product