YOUNGSIN-RF has been leading domestic RF device area by investigating in research and development since 1989, despite lack of fundamental material industrial and its theoretical background in KOREA.
We have enhanced productivity and simplified maintenance, which have result in a competitive price. By manufacturing various RF generator and matcher models varying 40W ~ 5KW, we provide our products from laboratory to mass production line not only domestic but also abroad. 

YSR RF Generator 3KW package

This package includes:

RF Power Generator - YSR-RF03K
 

Auto Matching Network Unit - AMN-130A-FA
 

Auto matching control software(If requested)

*it’s possible to select one to purchase

Description

YSR-RF03K(RF Generator)

 YSR-RF03K is the 3KW RF Generator YOUNGSIN-RF developed. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. Multi protection functions is added for reliability of the product. That’s why this product can be utilized in various and specific applications, such as CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma and so on.
 

AMN-130A-FA(Matching network Unit)

AMN-130A-FA is the Matching Network Unit which is rated at 3KW max. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. About matching control, because of Preset Matching position, Auto Matching control within 2 seconds can be fully operational. In addition, Full digital Matching Software can enable users to adjust Matching position value more precisely.

Benefits & Features

YSR-RF03K

• Modular Design to reduce lead time.
• User-friendly Operation mode including Step 1,2,3 mode.
• VFD screen to check RF power status in real time.
• Various applications- CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma. 
• Use of AMP module for stable and high RF power delivery.   
• Multi protection functions- Sensor detection against over RF power, over voltage, over heat and the rest.

AMN-130A-FA

• Possible to select Full Digital Matching method.
• Matching Speed: Auto Matching within 2seconds. 
• Use of Stepping Motor to upgrade accuracy and speed.
• Possible to adjust matching control positions on self-developed Full Digital Matching Software.

Specifications