Outline

OLED system of the VTS corporation is constructed to allow deposition of organic materials and metals within separate process chambers for the next geberation organic LEDs (OLEDs).

This equipped with separate globe box for easy handling of sources and controlling oxygen and moisture under 3ppm to keep features of the film after deposition.

Feature

1. Evaporation of almost every materials possible.

2. High deposition rate and freedom from contamination.

3. The chambers are constructed in-line type.

4. Easy operation and multi purpose.

5. Manually or automatic operation possible.

General specification

1. Source materials: Metal & Organic material

2. Substrate materials: Si, Glass, etc.

3. Substrate size: 10 x 10 (cm)

4. Ultimate pressure: ≤ 5E-6 Torr

5. Glove box: O2 & H2O < 3ppm

6. Metal chamber: Tungsten boat type, 2kW(1set)/Effusion cell(Cu, In, Ga, Se, LiF/5sets)

7. Organic chamber: Tungsten boat type, 2kW(3sets)/Effusion cell(3sets)

8. Vaporize: ≤±5% at 1,000Å (Alq3)

9. Stability: Effusion cell (≤±0.005Å at 1Å/s)

                  Thermal boat (≤±0.1Å at 1Å/s)

10. Mask Alignment: <300um