RTA - Rapid Thermal Annealing System

RTA - Rapid Thermal Annealing System


Negotiable Min Order Quantity Unit

Required Quantity
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Shipping / Lead Time
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Keyword
Category
Other Machinery & Industry Equipment

ForALL

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

16

DUNS

Product name RTA - Rapid Thermal Annealing System Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

FA-RTP can be profit for the processes that require minimization of process time and thermal buggets of substrated such as thin gate oxidation, rapid annealing of deposited film, etc.

Application

  • Generally, AM-OLED, TFT-LCD, Low-K dielectrics, post implanting annealing, semi-conductor fabrication.

Technology

  • Optimized hardware and temperature control
  • Excellent temperature uniformity
  • Capability of alternative ATM & vacuum process
  • 2~4 inch wafer mountable
  • Bench top type of compact design (L700mm x W400mm x D450mm)

Specification

  • 1 rectangular type process vacuum chamber
  • water cooling for chamber wall /radiation shield
  • Ni-Au surface coating for reflector
  • O-ring sealed sliding door
  • Double side radiation heating with halogen lamp
  • Ramping ratio of temperature : heating up to 1,000 °C
  • Temperature uniformity : Ø2% on 4 inch wafe
  • Programmable temp. controller
  • 2~4 inch wafer mountable
  • Low vacuum pumping system
  • Up to three(3) gas lines
  • User friendly PLC control with touch panel

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

ForALL

Country / Year Established
South Korea South Korea /
Business type
Others

16

DUNS

President
Minsub Oh
Address
1673-22, shilil-dong,, Daeduck-gu, Daejeon, Korea
Product Category
Other Machinery & Industry Equipment
No. of Total Employees
1-50
Company introduction

ForALL is a service company with a mission bring customers value through our products and support service.
We capitalize by becoming a regionally recognized brand name with our thin film deposition equipment and quality service.

Our goal is for moderate growth and annual profitability while maintaining our sense of humor.

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