OZONE - Inductively Coupled Plasma Etcher
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
ForALL
- Country / Year Established
- South Korea /
- Business type
- Others
- Verified Certificate
-
16
Product name | OZONE - Inductively Coupled Plasma Etcher | Certification | - |
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Category | Other Machinery & Industry Equipment | Ingredients | - |
Keyword | - | Unit Size | - |
Brand name | - | Unit Weigh | - |
origin | Stock | - | |
Supply type | - | HS code | - |
Product Information
OZONE has been used to perform high speed etching for GaAs, GaN, Si deep trench. It offers a low risk manufacturing solution, high profit via high productivity to customer.
Application
- Anisotropic etching of all type of silicon based film, etching of GaAs, GaN, Inp and other compound semiconductor material, fabrication of micromachines, etching of metal films.
Technology
- High & uniform density ICP plasma
- Active wafer temperature control (He backside cooling)
- High process productivity
- Recipe storage and data logging
Specification
- 1 process chamber
- 1 load lock chamber with standard wafer magazines
- Robot arm transfer module
- Electrostatic wafer clamping with He backside cooling
- High density plasma source
- RF generator & 13.56MHz auto matcher for ICP source&substrate bias
- Turbo molecular pump of high-vacuum pumping
- Auto pressure control with throttle valve
- Gas delivery module with mass flow controller
- Manual / PC, PLC control including Windows user interface
for fully automatic process control
B2B Trade
Price (FOB) | Negotiable | transportation | - |
---|---|---|---|
MOQ | Negotiable | Leadtime | Negotiable |
Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Minsub Oh
- Address
- 1673-22, shilil-dong,, Daeduck-gu, Daejeon, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
ForALL is a service company with a mission bring customers value through our products and support service.
We capitalize by becoming a regionally recognized brand name with our thin film deposition equipment and quality service.Our goal is for moderate growth and annual profitability while maintaining our sense of humor.
- Main Product
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