Mini Batch Vertical Furnace
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
PST Co., Ltd.
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
16
| Product name | Mini Batch Vertical Furnace | Certification | - |
|---|---|---|---|
| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
Application
- Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD
Features
- Mini Batch Type Vertical Furnace
- Vertical Furnace for 100~300mm wafers
- 2 I/O Port
- Boat Rotation Available
- PFlexibility for S/W upgrade
Specification
Parameters |
Unit |
Specifications |
Wafer size |
mm |
150 ~ 300 |
Maximum Temp Zone |
°C |
1200 |
Constant Temp Zone |
mm |
> 500 |
Temp Uniformity |
°C |
< ±0.5 |
Wafer Pitch |
mm |
6.35 [5.2~9] |
Batch Size |
#of wfs |
50[max 75] |
Throughput [4hr Process] |
#of wfs/mo |
9000 |
Temp Control |
#of zones |
4 |
Temp Control method |
TC |
Spike, Profile, Cascade |
Water Loading System |
Manual / Auto |
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- YU, JAE AN
- Address
- 451-2 Ipyeong-ri, Majang-myeon, Icheon-si, Gyeonggi-do, 467-812, KOREA
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
First of all, thank you for visiting PST website.
PST established since 1999 and has been developing semiconductor manufacturing equipment with basis of high technology. Who can achieve the highest technology and satisfaction?
But we are facing to full satisfaction with high technology. We are stepping your side soon.
- Main Markets
-
China
- Main Product
