Magnetron Sputtering System
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
AlphaPlus Co., Ltd.
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
16
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| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
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Product Information
Magnetron Sputtering Gun & Power Supply
- Crucible type sputtering gun
- 1, 2, 3, 4, 5, 6 ,8, 10, 12, 13 inch sputtering gun
- 1, 2. 3. 4 inch sputtering gun for ultra-high vacuum - Magnet : Permanent : NdFeB
- Fixed magnet : film uniformity, < ± 3.0%
- Moving magnet : film uniformity, < ± 1.5% - Cathode body : OFHC copper
- Rectangular type sputtering gun
- Width : 1,5 to 4 inch (to 10 inch for double erosion)
- Length : 5 to 25 inch (to 120 inch for large planar area deposition)
- Magnet : permanent - NdFeB
- Cathode body : OFHC copper
Power supply
- DC power supply : 1 to 20 kW
- MF power supply : 1 to 20 kW
- RF power supply : 0.3 to 15 kW
Thin Film Deposition Control
- IC-5 and PC control
- Control process parameter
Program processes 50, total deposition layers 250, process materials 24 - Quartz crystal osscillation sensor - single, dual or six sensors
- Thickness monitoring and process control by PC programming
- Thickness monitoring and process speed control by PC programming
- Large area deposition like a ITO for LCD
- Application to "In-line magnetron sputtering system"
- Substrate size : square 20 up to 120 inch - Mass flow and auto pressure control
- Mass flow controller for various gas
- Baratron vacuum gauge for plasma processing
- Throttle valve and controller
Vacuum Chamber
- Cylindrical Chamber
- Diameter. Ø 300 ~ 2,000mm (Substrate : 2 to 12 inch, 1 to 400 sheets)
- Height : 500mm - Square Chamber
- Various size (Order made after proposal to and discussion with customer) - Loadlock with automation sample transfer
Vacuum Pumping and Measurement
- Low vacuum : dry pump and convectron gauge
- High vacuu : turbo molecular pump, cryp pump and ion gauge
Control System by PLC, PC with Touch Screen
Optional Parts
- RF power supply for substrate pre-cleaning and plasma assistant
- Temperature controller for substrate heating
- Substrate translation for large area substrate
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- HWANG, DO WEON
- Address
- 2Venture Bldg. 207 Pohang Techno Park, #601 Jigok-dong, Pohang Si Nam-gu, GYEONGSANGBUK-DO,790-834, KOREA
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
[Management based on fundamental rules and principles]
The fundamental goal of company is to protect the rights and the interests of the customers as well as its employees. Alpha Plus pursues transparent management under the motto "Without honesty, no self-confidence" so that the professionals who advocate fundamental rules and principles can work with pride.
[Management policy]
Alpha Plus continues to develop our core capabilities by improving world's best products, building global networking, and opening the offices to the talented to join the core company ranks of global industrial development, and aims at the superior company taking the initiative in the preservation of environment and future value creation[Vision]
Developed to a superior enterprise with global power of competition corp.
We, Alpha Plus develop continuously and head for the value creation of the future and nature conservation with the exploitation of the world best products and human resources to join the major enterprise group of global industrial development.
- Main Product
