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Magnetron Sputtering System

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AlphaPlus Co., Ltd.

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Product name	Magnetron Sputtering System	Certification	-
Category	Other Machinery & Industry Equipment	Ingredients	-
Keyword	-	Unit Size	-
Brand name	-	Unit Weigh	-
origin		Stock	-
Supply type	-	HS code	-

Magnetron Sputtering Gun & Power Supply

Crucible type sputtering gun
- 1, 2, 3, 4, 5, 6 ,8, 10, 12, 13 inch sputtering gun
- 1, 2. 3. 4 inch sputtering gun for ultra-high vacuum
Magnet : Permanent : NdFeB
- Fixed magnet : film uniformity, < ± 3.0%
- Moving magnet : film uniformity, < ± 1.5%
Cathode body : OFHC copper
Rectangular type sputtering gun
Width : 1,5 to 4 inch (to 10 inch for double erosion)
Length : 5 to 25 inch (to 120 inch for large planar area deposition)
Magnet : permanent - NdFeB
Cathode body : OFHC copper

Power supply

Thin Film Deposition Control

IC-5 and PC control
- Control process parameter
Program processes 50, total deposition layers 250, process materials 24
Quartz crystal osscillation sensor - single, dual or six sensors
Thickness monitoring and process control by PC programming
Thickness monitoring and process speed control by PC programming
- Large area deposition like a ITO for LCD
- Application to "In-line magnetron sputtering system"
- Substrate size : square 20 up to 120 inch
Mass flow and auto pressure control
- Mass flow controller for various gas
- Baratron vacuum gauge for plasma processing
- Throttle valve and controller

Vacuum Chamber

Cylindrical Chamber
- Diameter. Ø 300 ~ 2,000mm (Substrate : 2 to 12 inch, 1 to 400 sheets)
- Height : 500mm
Square Chamber
- Various size (Order made after proposal to and discussion with customer)
Loadlock with automation sample transfer

Vacuum Pumping and Measurement

Control System by PLC, PC with Touch Screen

Optional Parts

AlphaPlus Co., Ltd.

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Address: 2Venture Bldg. 207 Pohang Techno Park, #601 Jigok-dong, Pohang Si Nam-gu, GYEONGSANGBUK-DO,790-834, KOREA

Company introduction: [Management based on fundamental rules and principles]

The fundamental goal of company is to protect the rights and the interests of the customers as well as its employees. Alpha Plus pursues transparent management under the motto "Without honesty, no self-confidence" so that the professionals who advocate fundamental rules and principles can work with pride.

[Management policy]
Alpha Plus continues to develop our core capabilities by improving world's best products, building global networking, and opening the offices to the talented to join the core company ranks of global industrial development, and aims at the superior company taking the initiative in the preservation of environment and future value creation

[Vision]
Developed to a superior enterprise with global power of competition corp.
We, Alpha Plus develop continuously and head for the value creation of the future and nature conservation with the exploitation of the world best products and human resources to join the major enterprise group of global industrial development.