E-beam Evaporation System

E-beam Evaporation System


Negotiable Min Order Quantity Unit

Required Quantity
Place of Origin
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
Category
Other Machinery & Industry Equipment

AlphaPlus Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

16

TRADE TOWER

DUNS

Product name E-beam Evaporation System Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Specification

Single or Convertible E - Beam Source

  • Hearth quantity : 1 ~12ea (Standard : 4,6ea)
  • Crucible capactiy : 7 ~ 40cc (Special size above 40 up to 200cc)
    - Standard : 25cc (4 or 6 Pocket), 40cc (4 Pocket)
    - Special crucible : 200cc (156cc for UHV) for long time deposition
  • Deflection angle : 180°, 270°
  • Output power : 6, 10, 15, 20kW
  • Dual or triple E-Beam source on one body
  • Sequential or simultaneous E-Beam evaporation of two or three materials
  • Very high evaporation rate in the case of same deposition material

Vacuum Chamber

  • Cylindrical chamber
  • Diameter : Ø500 ~ 1500mm
  • Height : 800 ~ 1500mm
  • Square chamber
  • Various size
    (Order made after proposal to and discussion with customer)

Vacuum Pumping and Measurement

  • Low Vacuum : dry pump and convectron gauge
  • High Vacuum : turbo molecular pump, cryo pump and ion gauge
  • Ultra - high Vacuum : turbo molecular pump, cryo pump and ion gauge

Control System by PLC, PC with Touch Screen

Thin Film Deposition Control

  • IC-5 (or XTC, XTM) and PC Control
  • Control process parameter
    - Program processes 50, total deposition layers 250, process materials 24
  • Quartz crystal oscillation sensor
    - Single, dual or six sensor
  • Optical monitoring system for optical multi-layers deposition
    - Range of measuring wavelength : 350~2000nm, resolution : 1nm
  • Thickness monitoring and process control by PC programming
  • Thickness monitoring and process speed control by PC Programming
  • Large area deposition like a MgO for PDP
  • Application to "In-line E-Beam evaporation system"
  • Substrate size : square 20 up to 100 inch
  • Film uniformity, <± 1.0 to 5.0%

Optional Parts

  • Mass flow controller for reactive and plasma assistant gas
  • Ion source and controller for plasma assisted deposition
  • RF power supply for substrate pre-cleaning
  • Temperature controller for substrate heating
  • Thermal evaporator, 1 or 2 boat
  • Effusion cell, 1 or 2 for doping
  • Chiller for system cooling

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

AlphaPlus Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

16

TRADE TOWER

DUNS

President
HWANG, DO WEON
Address
2Venture Bldg. 207 Pohang Techno Park, #601 Jigok-dong, Pohang Si Nam-gu, GYEONGSANGBUK-DO,790-834, KOREA
Product Category
Other Machinery & Industry Equipment
No. of Total Employees
1-50
Company introduction

[Management based on fundamental rules and principles]

The fundamental goal of company is to protect the rights and the interests of the customers as well as its employees. Alpha Plus pursues transparent management under the motto "Without honesty, no self-confidence" so that the professionals who advocate fundamental rules and principles can work with pride.

[Management policy]
Alpha Plus continues to develop our core capabilities by improving world's best products, building global networking, and opening the offices to the talented to join the core company ranks of global industrial development, and aims at the superior company taking the initiative in the preservation of environment and future value creation

[Vision]
Developed to a superior enterprise with global power of competition corp.
We, Alpha Plus develop continuously and head for the value creation of the future and nature conservation with the exploitation of the world best products and human resources to join the major enterprise group of global industrial development.

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