Features

• Fully automatic operation;
• EB-Gun or Thermal Evaporation configurations are available;
• Semi-automatic Robot loading-unloading System for substrate holder;
• Reliable and rugged design;
• The wide range of options, extending system applications.

Configurations

1. Pumping System
   • Diffusion Pump Model: VTC DP-28" (2 sets), 4-stage, water-cooled
   • Rotary Pump (1 set) Model: E2M275, (Edwards High Vacuum, UK)
   • Booster Pump (1 set) Model: EH 2600, (Edwards High Vacuum, UK)
2. EB-Gun
   • Model: TELEMARK, USA. The Coater can include up to 3 EB-guns.
   • Variety of crucibles can be supplied: 4pocket x (7~25CC); 6 pocket up to 40cc each; 3 pocket banana type of 25CC; trough type pocket (190~383CC), pan type (150~345CC).
3. Substrate Heating System
   • Heating System incorporates six Infra-Red Heaters and provides substrate heating up to 300°C. It is equipped with auto-temperature control.
4. Deposition Controller
   • Model: TELEMARK 860, USA. It provides extensive program storage: 99 processes, 999 layer definitions, 32 complete material definitions.
   • Single, Dual or Six crystals Sensor Head according to customer's demand; ceramic or Teflon insulated, bakeable.
5. Touch Screen Display:
   • Model PMU-600, LG, rack mounted. It enables easy and convenient control of machine operation and indicates the real time parameters, which are important for machine operation.
6. System Operation
   • Fully automatic, with a control provided by PLC or PC

Specification