RIE system

RIE system


Negotiable Min Order Quantity Unit

Required Quantity
Place of Origin
South Korea
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
plasma etching, rie system, urs
Category
Vacuum Equipment & Parts

ULTECH

Membership
VIP
Country / Year Established
South Korea South Korea / 1998
Business type
Manufacturer
Verified Certificate

16

DUNS

Product name RIE system Certification -
Category Vacuum Equipment & Parts Ingredients -
Keyword plasma etching , rie system , urs Unit Size -
Brand name - Unit Weigh -
origin South Korea Stock -
Supply type - HS code -

Product Information

 

[ Model ] 

-. URS-200L-003

[ Specification ] 

-. Substrate size & load capacity
             : 156mm*156mm wafer - 1 wafer/batch
-. RF power 600W
-. Dry pump
-. Throttle valve + APC controller
-. Baratron gauge + Convectron gauge
-. MFC: Ar(200sccm), O2(200sccm), SF6(200sccm), Cl2(200sccm)
-. Loadlock chamber (stand-alone type)
-. PC control

[ Application ]

-. Bulk / Poly silicon etching (MEMS & NANO) 
-. Dielectrics etching (SiO2, Si3N4, etc.) 
-. Compound semiconductors etching (GaAs, GaN, etc.) 
-. Polymide etching

 

Product Info Attached File

ULTECH CATALOG 2014 .pdf

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

ULTECH

Country / Year Established
South Korea South Korea / 1998
Membership
VIP
Business type
Manufacturer

16

DUNS

President
SUK, CHANG-GIL
Address
17, Seongseogongdan-ro 11-gil, Dalseo-gu, Daegu, Korea, 704-240
Product Category
Vacuum Equipment & Parts
Year Established
1998
No. of Total Employees
1-50
Company introduction

ULTECH was formed in 1998 by a group of individuals with extensive experience in the semiconductor manufacturing system. ULTECH is a process equipment company that develops and manufactures a wide variety of deposition, etching, and surface treatment systems. Its the people that make the difference at ULTECH. We care about our customers and our products.

ULTECH consists of engineers who have technology and dream for the future. ULTECH endeavors all our technology and dreams to develop the high-performance semiconductor/MEMS manufacturing equipment. ULTECH promises that ULTECH will concentrate all his/her abilities to provide you the high-performance and low cost equipments which give you a high competitive power and priority in semiconductor and MEMS industry.

 

Main Markets

China China

India India

Tunisia Tunisia

Main Product

Related Products

Other buyers also search

Membership Grade

BUYER

Biz Pro VIP

SELLER

Biz Pro VIP
팝업닫기
Live Chat A new message arrives
from a business partner.

No Data

  • There is no data to load
  • Check out the My TK > My Inquiries list.
  • After agreeing to the use of the Live Chat service, the list is printed only when there is at least one history of receiving or sending a Live Chat request.

If you have not yet agreed to use the Live Chat service,

You can use the Live Chat freely after agreeing to the use of the Live Chat service.

View more
View more