PEALD system
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- South Korea
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- cvd deposition, peald system, metal oxide deposition
- Category
- Vacuum Equipment & Parts
ULTECH
South Korea
- Verified Certificate
-
16
| Product name | PEALD system | Certification | - |
|---|---|---|---|
| Category | Vacuum Equipment & Parts | Ingredients | - |
| Keyword | cvd deposition , peald system , metal oxide deposition | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | South Korea | Stock | - |
| Supply type | - | HS code | - |
Product Information
[ Model ]
-. SPACE-S
[ Specification ]
-. Substrate size & load capacity
: 8inch wafer - 10 wafer/batch
-. Source(gas) injection : Showerhead type
-. Molded heater, Heater temp. 650℃, up/down
-. RF power 1kW 1ea
-. Dry pump
-. Throttle valve + APC controller
-. Bubbler(heating) 2set
-. Bubbler(cooling) 2set
-. MFC: Ar(500sccm, for carrier 4ea, for dilute 1ea, for process 1ea), O2(500sccm),
H2(500sccm), NH3(500sccm), N2(500sccm), NF3(500sccm)
-. Loadlock chamber (10wafer cassette type)
-. PC & PLC control
[ Application ]
-. Metal / Poly silicon / Silicon nitride deposition
-. Metal oxide deposition: Al2O3, HfO2, ZnO,TiO2,CIGS
- Product Info Attached File
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- SUK, CHANG-GIL
- Address
- 17, Seongseogongdan-ro 11-gil, Dalseo-gu, Daegu, Korea, 704-240
- Product Category
- Vacuum Equipment & Parts
- Year Established
- 1998
- No. of Total Employees
- 1-50
- Company introduction
-
ULTECH was formed in 1998 by a group of individuals with extensive experience in the semiconductor manufacturing system. ULTECH is a process equipment company that develops and manufactures a wide variety of deposition, etching, and surface treatment systems. It’s the people that make the difference at ULTECH. We care about our customers and our products.ULTECH consists of engineers who have technology and dream for the future. ULTECH endeavors all our technology and dreams to develop the high-performance semiconductor/MEMS manufacturing equipment. ULTECH promises that ULTECH will concentrate all his/her abilities to provide you the high-performance and low cost equipments which give you a high competitive power and priority in semiconductor and MEMS industry.
- Main Markets
-
China
India
Tunisia
- Main Product
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