Rapid Thermal Process system

Rapid Thermal Process system


Negotiable Min Order Quantity Unit

Required Quantity
Place of Origin
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
fabrication, graphite
Category
Machinery & Parts

VTS Corporation.

Membership
BIZ
Country / Year Established
South Korea South Korea / 2003
Business type
Manufacturer
Verified Certificate

16

TRADE TOWER

DUNS

Product name Rapid Thermal Process system Certification -
Category Machinery & Parts Ingredients -
Keyword fabrication , graphite Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Outline

Rapid thermal process system of the VTS corporation is an R&D equipment for vacuum heat treatment of a various kind of thin films including metal, alloy and non-metal oxide. It is composed of a reactor to load one 1sheet of 6inch wafer, a radiation type heater having temperature stability and re-productivity, and a vacuum system. The reactor consists of quartz tube, wafer holding and transporting modules. The heater has a adopted a radiation lamp type with ±5% of temperature uniformity.

 

Features

1. Hot wall furnace’s function

2. Heating up to 1000℃ within 20sec

 

General Specification

1. Substrate materials: Graphite

2. Substrate size: Dia. 6inch wafer mountable

3. Base pressure: < 3E-3 Torr after nitrogen purge

4. Temperature: Max 1000℃ within 20sec

5. Heating up rate: 10 ~ 100℃/sec

6. Cooling down rate: 50℃/sec

7. Temp. uniformity: ≤ ±5% @ set point

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

VTS Corporation.

Country / Year Established
South Korea South Korea / 2003
Membership
BIZ
Business type
Manufacturer

16

TRADE TOWER

DUNS

President
Wonho Jung
Address
1331 Gwanpyung Dong Yusung Gu Daejeon KOREA
Product Category
General Industrial Equipment,Industrial Supplies,Machinery & Parts
Year Established
2003
No. of Total Employees
1-50
Company introduction

VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.

We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...

Main Markets

China China

India India

Indonesia Indonesia

Japan Japan

Malaysia Malaysia

Pakistan Pakistan

Singapore Singapore

South Korea South Korea

Taiwan Taiwan

U.S.A U.S.A

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