FEATURES

* Liquid supply system and tools used for semiconductor and all proseccing.

* Protects pump and other equipement against low flow and no flow.

* compact, easy to use

* Cleaning and packing in CAS Semicondoctor's factory.

SPECIFICATIONS

1. Model : CAS - FS Series

2. Liquid : All Liquids (Chemicals)

3. Range : More then 3 LPM

                  Different Range Available

4. Accuracy : ±3% fo Full scale

5. Operating Temperature : -20 ~ 80^oC

6. Operating Pressure : 10kg/cm2

7. Humidity : 0 to 95% RH

8. Power : 24 VDC with reserve polarity protection

9. Material

     Body : P.P

CAUATION

1. Tighten the screw to match the arrow to the main body with the flow direction. the paddle should be cut, in case the flow amount is set at more than the maximum value if

2. Although the size of the paddle may differ from the pipe line and the flow amount set forth, the paddle should be cut, in case the flow amount is set at more than the maximum value if set at more than the maximum value if adjustment range is required.

3. Do not touch any screws other than the adjusting screw for flow amount in the cover.

4. Take care not to be fallen down on the ground to avoid any shock.

5. Please note that the flow amount has been adijusted to the minimum value at the time of delivery.